>20.5% Diamond Wire Sawn Multicrystalline Silicon Solar Cells With Maskless Inverted Pyramid Like Texturing

In this paper, we demonstrate novel texturing technologies developed for diamond wire sawn multicrystalline silicon wafers. SEM analysis shows that inverted pyramid like texture is produced on the wafer surface by a combination of reactive ion etching and metal-assisted chemical etching technologies. The inverted pyramid like textured surface shows remarkable antireflection performance over the other two types of texturing technologies. Screen-printed passivated emitter rear contact cells are fabricated to illustrate the effect of different texturing on cell performance. The cells with inverted pyramid like texture show the highest batch average efficiency of 20.51%, with the best efficiency of 20.69%. Detailed performance parameters and quantum efficiency for each type of cells are shown in the paper. Quantum efficiency simulations are also performed based on the reflectance and control parameters measured during the cell fabrication process. In addition, light-induced degradation of the cells is also analyzed.