Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil

We demonstrate operation of an interferometric optical gyroscope that uses an on-chip 3m ultra-low-loss silicon nitride waveguide coil. The measured minimum waveguide loss of the waveguide coil fabricated using lithographic die stitching was 0.78 dB/m. The angle random walk and bias instability of the gyroscope were characterized to be 8.52 deg/hr
^1/2
and 58.7 deg/hr respectively.