Origami-Like 3-D Folded MEMS Approach for Miniature Inertial Measurement Unit

This paper presents a miniature 50 mm
³
inertial measurement unit (IMU) implemented using a folded microelectromechanical systems (MEMS) process. The approach is based on wafer-level fabrication of high aspect-ratio single-axis sensors interconnected by flexible hinges and folded into a 3-D configuration, like a silicon Origami [1]. Two different materials for flexible hinges have been explored, including photo-definable polyimide and parylene-C. We report, for the first time, an IMU prototype with seven operational sensors: three accelerometers, three gyroscopes, and a prototype of a reference clock. This paper concludes with the results of experimental characterization of inertial sensors demonstrating the feasibility of the proposed approach for a compact IMU.