Optimization of the grating-based structures for the efficient SERS substrates

In work a results of optimization grating-based structures for surface-enhanced Raman spectroscopy (SERS) substrates are presented. Optimized substrates on base of rectangular metal/dielectric and metal/metal grating-based structures have a SERS sensitivity of about 10
⁴
-10
⁵
for some different molecules. There is strong dependence of the maximum of enhanced SERS signals for given wavelength on certain gratings period, depth and filling factor, which corresponds to local surface plasmon resonance at metallic interface.