A comparative study of conventional single-mass and amplitude amplified dual-mass MEMS Vibratory Gyroscopes

This paper presents preliminary experimental results on a novel dual-mass MEMS gyroscope with mechanical amplification of amplitude. A side-by-side comparison between proposed dual-mass and conventional single-mass gyroscopes is presented and the effect of amplitude amplification on the scale factor and noise characteristics is discussed. The dual-mass gyroscope demonstrated a scale factor of 0.465 mV/(deg/s) in the open-loop rate-mode of operation, which is three times higher sensitivity than the single-mass gyroscope. The dual-mass gyroscope also showed a superior performance in bias stability and Angle Random Walk (ARW).