Tactical-grade dual-chip inertial sensor assembly

This paper presents a two die assembly of inertial sensors consisting of three (3) orthogonal gyroscopes and three (3) orthogonal accelerometers which demonstrates tactical-grade performance and occupies a total volume of 112 mm
³
. The sensor mechanisms are identical to existing tactical-grade products while the volume reductions are achieved by combining the sensors into a two-die stack that is wafer-level sealed. Noise floors less than 0.125 deg/rt-hr for gyroscopes and 0.1 fps/rt-hr for accelerometer as well as bias stabilities less than 30 deg/hr for the gyroscopes and less than 10 mg for the accelerometers are reported.