Micro shell resonator with T-shape masses fabricated by improved process using whirling platform and femtosecond laser ablation

This paper presents an improved process to fabricate micro shell resonator (MSR) with eight circular-distributed T-shape masses including fused silica (FS) torch-blowing based on whirling platform and femtosecond laser ablation. The resonator is formed by micro blow torch and flowing a thin FS whirling at high speed, and ablating the eight T-shape masses using femtosecond laser. The highly symmetric shell structures and T-shape masses of better surface quality are fabricated through above-mentioned process. Experimental results of frequency response show obviously smaller frequency splits of 12Hz and higher mechanical quality factor (Q), which further demonstrates the feasibility of the process.