Visualization technique of maintenance work with a motion capture sensor

A motion capture technique was developed to record a worker's motion during preventive maintenance, especially during the wiping process of wet cleaning. The time-series three-dimensional coordinal data of a worker's hand was successfully obtained with a motion capture sensor, and three different possible movements were distinguished. In addition, the data was correlated with the change in the number of particles on the surface of a chamber part before and after wiping. These results indicate that key indicators of high-quality maintenance work can be extracted from workers' motions using this technique.