Fabrication challenge, device characterization of high-Q 2D, 3D passives devices on glass

It is demonstrated that the high quality factor of thick metal spiral inductors, 3D solenoid inductor and low harmonics power level can be achieved by using a mature glass substrate technology. The quality factor of inductors in a 2D/3D type can achieve 70~100 in this study. The harmonics power level is measured along transmission line and 2nd /3rd harmonics can be below -110 dBm at 30 dBm input power. It is very critical and helpful with high Q-factor and lower harmonics power level for the FEM development of current and next generation's commercial 4G carrier aggregation system.