Development of Plasma Flood Gun for Gen 5.5 Implanter

A plasma flood gun (PFG) has been developed for Nissin implanter "iG5 [1]" and "iG6" for Gen. 5.5 and 6.0 flat panel display (FPD) process. The PFG with a filament cathode can supply high electron flux in order to neutralize the surface charge of glass substrate irradiated by the high current ion beam [2]. We investigated the charge-up of the target glass substrates irradiated by the ion beam and the neutralization effect by the PFG using the Single Langmuir probes. The PFG effectively reduced charge-up voltage, and this neutralization effect appeared uniformly at the all part of the glass surface in the large size ribbon beam.