Investigation of the polarization depth distribution of PZT thick films by LIMM

The pyroelectric Laser Intensity Modulation Method (LIMM) was applied for the characterization of the polarization depth distribution of ferroelectric thick films. The influence of an corona discharge on the polarization distribution of polarized and depolarized regions was investigated. Inhomogeneities in the surface potential of corona charged films can be correlated to inhomogeneities in the microstructure by a x-y-scan of the sample at different modulation frequencies (pyroelectric tomography).