Fabrication of flexible polymer bio-MEMS with submicron features

We present a fabrication method for thin-film polymer MEMS that achieves an order of magnitude improvement in feature size and resolution. Specifically, we modified the electron beam lithography (EBL) process for biocompatible poly(chloro-para-xylylene) (Parylene C), enabling flexible, encapsulated titanium structures with features as small as 100 nm. The mechanical, electrical and material properties of these Parylene nanodevices were investigated, and strategies to further reduce feature size and achieve batch scale nanofabrication are discussed.