Aerosol particle size spectrometer using a micromachined cascade impactor

This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.