Time Domain Reflectometry Analysis of the Dispersion of Metal–Insulator–Metal Capacitance

The capacitor dielectric dispersion characteristic has become an important design parameter, because the effective dielectric constant of a high-k dielectric significantly changes at high frequencies. However, current methods for capacitance measurement have limitations in the measurement range or the test complexity. In this letter, a new method to measure the dispersion characteristics at a wider frequency region was demonstrated using time-domain reflectometry. Using this method, the dispersion characteristics can be obtained from 200 kHz to 70 MHz without using any complex test structure or compensation procedure.