Ohio MEMSNet: an innovative approach to providing MEMS infrastructure

Summary form only given. Ohio MEMSNet was established in 1995 to provide a state-wide infrastructure for the design, fabrication, and testing of emerging microelectromechanical systems (MEMS) that would be accessible by academic, research, and industrial organizations. The network's mission is to enhance and promote education, research, development, and commercialization of MEMS technology. The MEMSNet framework includes a centralized fabrication facility, five distributed technology nodes which contain design and testing capabilities, a "technology toolbox" of available services, and the requisite administrative protocols for operating a multiorganizational network. This approach, with strong governmental support, addresses the barriers to broad-based entry into the MEMS field, nurtures collaboration between academic and industrial partners, and enhances educational opportunities. The founding institutions are Case Western Reserve University (lead), University of Cincinnati, Ohio State University, Wright State University, University of Toledo, and the Cleveland Clinic Foundation. This paper will provide an overview of Ohio MEMSNet and highlight its success to date in strengthening existing MEMS programs and spawning new MEMS efforts in the State of Ohio.