Integrated circuit fabrication technology and laboratory courses at the University of Arkansas

Since 1979, the Department of Electrical Engineering, University of Arkansas, Fayetteville, AR has offered the courses, IC Fabrication Technology (ELEG 5213) and its laboratory sequel, IC Fabrication Lab (ELEG 5293), as technical elective courses for seniors and graduate students interested in a microelectronic processing emphasis. The IC Fab Tech course covers silicon crystal growth, epitaxy, oxidation, diffusion, ion implantation, CVD and PVD growth, and metallization processes and their underlying mechanisms. In the IC Fab Lab, students start with polished Si wafers and use a six level mask set to fabricate various test structures. These include planar four probe resistors, capacitors, p-n junctions, bipolar transistors, MOS devices, and other process control and alignment structures. This lab is conducted in the Teres Instruments Solid State Laboratory of the Department of Electrical Engineering and is equipped with an RO system for the de-ionized water and Class 100 laminar flow workbenches.