Effect of the cathodes on the characteristics of the MEMS based electrochemical seismometer

The effects of the cathodes on the characteristics of the electrochemical seismometer were first studied in this paper. By utilizing the proposed MEMS fabrication process, four types of devices with cathodes of different structures were carefully designed and fabricated for comparison. The experimental results indicated that the sidewall cathodes mainly affected the attenuation rate in the high frequency domain and the surface cathodes per unit area had more effects on the device sensitivity than the sidewall cathodes per unit area. Moreover, the proposed electrochemical seismometers only with surface cathodes were featured with central working frequency less than 1 Hz.