ZnO thin films for applications in surface acoustic wave actuators

Presented research results refer to ZnO thin film in application of microfluidic devices dedicated for cell separation and controlled translation within a microchannel volume. For that purpose good quality layers of ZnO thin films were grown on ST-cut quartz by RF sputtering. All necessary results regarding material parameters from point of view of application in transparent microfluidic system are presented. SAW delay lines were fabricated on ZnO substrates with and without annealing. IDT's were characterized using a network analyzer. ZnO substrates after thermal post-processing generated SAW of the Rayleigh type and without annealing the Lamb or Love type waves.