Narrowband MEMS resonant infrared detectors based on ultrathin perfect plasmonic absorbers

This paper reports on the demonstration of narrowband uncooled microelectromechanical resonant infrared detectors based on ultrathin perfect plasmonic absorbers. The integration of a deeply subwavelength thin (230 nm) plasmonic absorber on a piezoelectric nano plate (480 nm) enables a near perfect and narrowband absorption of mid-wavelength infrared radiation (~92% at 4.7 μm with a full width at half maximum ~800 nm) in an ultralow volume resonant thermal detector. The excellent thermal isolation (~2.4×10
⁵
K/W) and the high electromechanical performance of the resonant thermal detector (quality factor, Q~1527 and electromechanical coupling coefficient kt
²
~1.74%) guarantee the achievement of high sensitivity and a low noise performance, resulting in the demonstration of a high resolution (noise equivalent power ~633 pW/Hz
¹²
) narrowband infrared detectors suitable for infrared spectroscopy and multispectral imaging system.