4H-SiC Trench IGBT With Back-Side n-p-n Collector for Low Turn-OFF Loss

In this paper, an n-p-n collector incorporated in the back side of a 4H-SiC trench IGBT is presented to reduce the turn-off energy loss. A comparative study between the proposed structure and the conventional structure is conducted through ATLAS. The simulation results have demonstrated that the turn-off energy loss is reduced by more than 82.96% with a slight degradation in the on-state voltage drop.