The design and matching of THz on-chip antenna in CMOS

This paper presents a design of 484GHz on-chip antenna for THz direct detector in TSMC 0.18µm standard CMOS technology. The on-chip patch antenna fed by microstrip transmission lines is designed and simulated by Ansoft HFSS. To improve the power transfer efficiency, an open-stub matching network is inserted between the antenna and the detector. The peak gain of the antenna is 3 dBi, The bandwidth of the antenna is 85GHz, which corresponds to 28% relative bandwidth. The size of the chip is 1200µm×1000µm and the area of the patch antenna is 397µm×264µm.