Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10
¹⁷
ions/cm
²
and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.