Investigation of tribological and mechanical properties of Nb-Al-N coatings before and after annealing

Coatings Nb-Al-N were deposited on a silicon substrate under argon and nitrogen by magnetron sputtering at a substrate temperature of 350 °C and a constant current of 250 mA at the aluminum cathode. The analysis of the dependence chemical composition, morphology, structure and mechanical properties of the annealing temperature were performed for different series of coatings. Coatings demonstrated high thermal stability after annealing to 1000 °C.