Nanoscale TiN/ZrN multilayered coatings, their structure and properties

Vacuum arc deposition of a cathodes method (Cathodic Arc Vapor Deposition) was used for deposition of multilayered coatings, based on TiN/ZrN systems, with different thickness of bilayers. Total thickness of the coatings was 11-19 μm, thickness of bilayers varied from 39 to 305 nm for different samples depending on deposition conditions. Such methods as X-Rays diffraction (XRD), Rutherford Backscattering (RBS), scanning electron microscopy (SEM) with microanalysis (EDS), high-resolution transmission electron microscopy (HR-TEM) and STEM with local microanalysis, as well as nanoindentation were used for investigations. Microstructure of the coatings and their wear resistance, as well as mechanical and tribological properties, were explored. Influence of the bilayer thickness on such properties mechanical and tribological of the coatings, as hardness, elasticity modulus, wear resistance and wear ratio were explored.