Frequency domain FEM analysis of reflector scattering characteristics for SAW tags

This paper proposes a frequency domain analysis (FDA) based on the finite element method (FEM) for calculating reflector scattering characteristics of SAW tags. This method is applicable not only to devices employing conventional single-crystal substrates but also multi-layered ones. First, reflection characteristics are calculated for a short reflector on 128°YX-LiNbO
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and compared with the result previously reported. Then the method is applied to short reflectors on the AlN/Si layered structure, and their applicability to SAW tags is discussed.