Optimum design of a capacitive pressure sensor

This paper presents a MEMS capacitive pressure sensor optimized for high sensitivity. It will find its importance in sensing intraocular pressure (IOP) of a Glaucoma patient. The study involves comparing maximum displacement of the movable diaphragm of a parallel plate capacitor for different designs. The sensor design involves clamped, edge slotted and corner slotted diaphragms. The results yielded a displacement of 0.6656 pm for clamped 0.9088 pm for corner slotted and 4.6811 pm for edge slotted diaphragms. The analysis was done using COMSOL Multiphysics and some of the results were compared with that of Coventorware.