Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization

In this paper, we present the fabrication and characterization of molybdenum microheaters for high-temperature gas sensing applications. The surface morphology of dc magnetron sputtered molybdenum thin films was characterized by scanning electron microscopy and atomic force microscopy. The suspended membrane microheater consumed 104 mW to reach a maximum temperature of 800°C and showed an absolute thermal resistance of 7.2°C/mW. Thermal distribution patterns over the active heating area were recorded using FLIR camera. It showed a temperature gradient of 1.18 % from the center of the microheater to its periphery. The thermal and mechanical stabilities of the microheater were analyzed, and its membrane failure at higher operating temperatures was prevented. The microheater membrane deformation at different temperatures was characterized using optical profilometer, and its maximum value was found to be $16.25~\mu \text{m}$ at 800 °C. The microheater response to a pulse, continuous pulse train, and constant dc voltages was characterized. Its response and recovery times are in the order of 19 and 34 ms, respectively. It showed a stable temperature with a negligible resistance drift (0.96%) over a period of 600 h. The TiO2 thin film integrated molybdenum microhotplate-based MEMS gas sensor response for CO (5000 ppb) was measured at different operating temperatures (300 °C-700 °C).