Sol-gel multimode interference power splitters

We report on the design and fabrication of 1×32 MMI power splitters through the sol-gel process. The MMI splitter is designed for 1.55-μm wavelength and characterized in terms of tolerance, wavelength response, and polarization sensitivity. The splitter is then UV-imprinted in aluminosilicate material coated on SiO
₂
. It is found that the responses of fabricated and designed splitter are in good agreement, with an excess loss of /spl sim/0.75 dB and power uniformity of /spl sim/0.95 dB.