Electric field in magnetized inductively coupled plasma

A wave equation has been solved to visualize two-dimensional axis symmetric electric field profiles in magnetized inductively coupled discharge having flat, concentric current loops operated at 13.56 MHz. The DC magnetic induction level of interest is 0-20 gauss. We assumed that the plasma is uniform throughout the discharge volume. The conductivity tensor derived from cold plasma approximation was used to consider electrical properties of the discharge. For a typical operation regime of high density materials processing plasmas (electron density /spl sim/1/spl times/10/sup 11//cm/sup 3/, collision frequency /spl sim/3 MHz, length of the vessel =25 cm), we observed a standing wave structure of RF electric fields.