The Lucky Electron Model for TDDB in Low-k Dielectrics

At the present time, there are at least six models to describe time dependent dielectric breakdown in low-k dielectrics. They all agree with highly accelerated test data quite well and are difficult if not nearly impossible to differentiate experimentally. However, two of the models appear to fit long term test data (more than 2 years duration) and have survived detailed statistical analysis better than the others. These two models differ considerably in the physical description. This paper describes in detail one of the models known as the “impact damage” model or the “lucky electron” model. Because of the particular physical model described, certain predictions can be made compared to the other contender, the “power law” model that may lead to suggestions for experiments to determine which if either of these models is correct, thereby suggesting further steps that may be taken to mitigate or discount the associated reliability problem.