Performance improvement of optical mouse sensors: Application in a precision planar stage

A cost-effective position measurement system based on optical mouse sensors is presented in this work. The system is intended to be used in a planar positioning stage for microscopy applications and as such, has strict resolution, accuracy, repeatability, and sensitivity requirements. Three techniques which improve the measurement system's performance in the context of these requirements are proposed; namely, an optical magnification of the image projected onto the mouse sensor, a periodic homing procedure to reset the error buildup, and a compensation of the undesired dynamics caused by filters implemented in the mouse sensor chip.