Micro-area Sheet Resistance Measurement System of Four-Point Probe Technique Based on LabVIEW

The sheet resistance of a silicon wafer with four point probes method is studied based on Labview software. With the help of data acquisition circuit and the Labview software programming, the resistivity of sillicon wafers is tested with the real-time. The system can also be completed for measurement data acquisition and data recordig, and other functions. The actual measurement and verification of the sample have been completed. Therefore, a possible method of testing sheet resistance for silicon wafers is carried out.