Development of 10kΩ quantum Hall array resistor

We reported the fabrication and characterization of the 10kΩ standard resistor which consists of 12 single quantum Hall bars on the AlGaAs/GaAs 2D electron gas wafer. The designed deviation of this resistor with the 10kΩ value is - 3.42×10
⁸
Ohm/Ohm. The preliminary DCC (digital current comparator) measurement shows that the value of the 10kΩ standard resistor deviates from the designed one of (-34.6 ±7.97) ×10
^-8
Ω/Ω. Accurate measurements are in progress.