An ultra-low phase noise 3.37 –3.58 GHz MEMS varactor based VCO with continuous frequency tuning

This paper presents a VCO that utilizes the analog capacitive tuning properties of a MEMS varactor for continuous frequency tuning. The MEMS based VCO achieves a tuning range from 3.37 to 3.58 GHz and a superior phase noise performance of −134.5 dBc/Hz at a 500 kHz offset from the carrier. This work shows the potential of MEMS varactors as attractive alternative to standard varactor solutions for frequency tuning of high performance VCOs.