Tribology development for manufacturing of laser zone textured glass substrates

CO/sub 2/ laser has been employed for our laser zone texturing directly on glass substrate. Bump feature control on laser textured glass substrate was reported. The relationships between the bump feature and tribology performances have been investigated. Typically for low fly height range, the bump height was arranged from 7 to 20 nm, bump diameter from 5 to 14 /spl mu/m, bump spacing from 15/spl times/15 to 75/spl times/75/spl mu/m. An excellent tribology performance can be achieved at even bump height down to 12 nm.