Non-parametric robustness analysis for feedback motion control for a high precision stage with large mass uncertainty

Robust feedback control with large parameter uncertainties in a high precision stage with large sample mass variation is presented. Instead of expressing the nominal plant and its uncertainty by parametric models, they are expressed using the identified frequency response data. The open loop transfer function is mapped onto a Nyquist plot, to assess robust stability. Next, the complementary sensitivity function is derived from this data to describe tracking performance, which is verified by experiments. The advantage is that the parameter estimation step is omitted, without compromising robust stability and performance.