Vacuum sealed and getter activated MEMS Quad Mass Gyroscope demonstrating better than 1.2 million quality factor

This paper presents the in-run bias stability of a high Q-factor Quad Mass Gyroscope (QMG), vacuum sealed with getter activated in Leadless Chip Carrier (LCC) package. Quality factors of 1.2 and 1.1 Million were measured along the layout-defined drive and sense modes. As-fabricated, frequency mismatch of 35Hz was electrostatically tuned to 200mHz, for a device with 2kHz center frequency. A performance improvement of 4X in Angle Random Walk (ARW) and 15X reduction in in-run bias stability were achieved after the electrostatic frequency matching between drive and sense modes, resulting in below 0.1 deg/hr bias stability. The results showed a strong dependency of the in-run bias stability of the gyroscope due to quality factor and frequency mismatches.