Energy-delay performance optimization of NEM logic relay

A methodology for optimizing the energy-delay performance of a nano-electro-mechanical relay is developed. Contrary to popular belief that structural stiffness should be minimized to achieve minimum switching energy, this work shows that the effective spring constant should be relatively large for better energy-delay performance. The optimal energy-delay of an aggressively scaled NEM relay (with 5 nm contact gap as fabricated) is presented.