Flip-chip bonded arrays of monolithically integrated, microlensed vertical cavity lasers and resonant photodetectors

We present flip-chip bonded arrays of novel, monolithically integrated, microlensed vertical-cavity lasers (VCLs) and resonant photodetectors. The bottom emitting VCLs exhibit ∼300 μA threshold currents, while adjacent detectors have the same operating wavelength and responsivities of ∼0.4 A/W. Only a single epitaxial growth is required.