Experimental investigation of powerful THz gyrotrons for initiation of localized gas discharge

Results of experimental tests of a high-power sub-terahertz gyrotron with a pulse solenoid are presented. The operating frequency corresponds to the atmospheric transparency window (0.66–0.67 THz). The output power up to 200 kW in single 50 microsecond pulses was obtained. The 0.3THz/0.5 MW tube is under experimental tests. Gas discharges have been realized in a wide range of pressures (0.01–1500 Torr) and different gases. Such discharges can be used as the pointed source of UV/VUV radiation, including the projection lithography.