Monolithic Mach-Zehnder Interferometer Modulator in an unmodified CMOS process

A compact monolithically integrated Mach-Zehnder Interferometer Modulator operating above 1Gbps is demonstrated in an unmodified 180nm CMOS SOI process. This 50μm long structure allows for high density integration of photonics modulators and electrical driver circuitry on a single standard CMOS chip.