Towards MZI modulator in GeOI and SOI waveguide platforms for Mid-InfraRed wavelengths

Silicon-On-Insulator and Germanium-On-Insulator are both promising waveguide platforms for the mid-infrared wavelength of 2 μm. Here, we report the design of passive and active devices including multimode interference couplers (MMI) and MZI modulators built on both platforms.