Geiger-mode avalanche photodiode arrays integrated with CMOS timing circuits

We report monolithic arrays of silicon Geiger-mode avalanche photodiodes, and their integration with arrays of CMOS processing circuits. This is an enabling technology for a new class of focal plane arrays whose pixels can detect single photons as well as time their arrival with sub-ns precision. The CMOS circuits can be tailored to support either 3D laser radar applications, where the time of arrival of the first detected photon is of interest, or high-dynamic-range passive imaging, where the rate of arrival of photons is of interest. This combination of capabilities is not supported by traditional focal plane technologies such as CCDs and active-pixel sensors.