Design and analysis of MEMS cantilever for pyroelectric energy conversion using COMSOL Multiphysics

Microelectromechanical Systems (MEMS) has found vast applications in today's world. Many applications in the field of aerospace, biomedicine, laser scanning displays and biomedical imaging systems are realized using MEMS technology. Pyroelectric materials show temperature dependent spontaneous electrical polarization converting thermal energy to electrical energy. In this paper, a self actuating MEMS cantilever for pyroelectric energy conversion is designed using COMSOL Multiphysics software. The energy conversion mechanism and response of a MEMS cantilever with PVDF as pyroelectric material is studied. The base materials used include Silicon Dioxide, Silicon, Aluminum, Polyvinylidine Fluoride (PVDF).