Fabrication and characterization of in-house developed resistor paste as buried micro heaters in LTCC for sensor applications

This paper presents structural, morphological and electrical characterization of the in-house developed ruthenium oxide based thick film resistor pastes for buried heater applications in LTCC. The basic electrical characterization of heater shows that the designed test heater achieved temperature up to 238°C. The required power to raise the temperature up to 238°C was 1.9W. It is found that the in-house resistor paste has better shrinkage compatibility with commercial LTCC Tape as compared with the manufacturer's own compatible resistor paste.