The machining and characteristics of an ultra-thin, plano-convex-type quartz oscillator

The authors have developed a grinding machining method for an ultra thin quartz plane and a curved surface as thin as 9 micrometers. A ring-supported, plano-convex type showed an ideal reactance frequency characteristics without any spurious resonance when the thickness is less than 112 micrometers. This method could machine a hard and brittle material such as LiNbO/sub 3/, and the oscillator showed a high performance.