Inductively coupled plasma for graphene production

This study is investigating the direct growth of graphene on a membrane filter and a copper surface by injecting ethanol vapor into an inductively coupled plasma (ICP) at atmospheric pressure. Low temperature (<;1000) graphene production is possible by an ICP plasma [1]. The discharge chemical mechanism will be analyzed by optical emission spectrum. The effects of the temperature and the plasma power on graphene sheets will be analyzed by SEM, AFM and Raman spectra.