The spl mu/-Flown- A Novel Device Measuring Acoustical Flows

An acoustical wave consists of two elements, the acoustic pressure and the acoustic flow. Till now to determine the acoustic flow one has had, to measure the pressure and calculate the flow. So it would be convenient to have a sensor which is able to measure acoustical flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor and some of its interesting applications will be presented. This micromachined device is called the microflown.