Temperature dependent characteristics of intrinsically switchable ferroelectric composite FBARs

This paper presents temperature dependent characteristics of intrinsically switchable ferroelectric composite FBARs. Ba
_0.5
Sr
_0.5
TiO
₃
and Si are used to form a composite FBAR. Measurement results show that both series and parallel resonance frequencies decrease with the temperature. The temperature coefficient of frequency is approximately -35 ppm/°C. The variation of quality factor and electromechanical coupling coefficient is less than 6.5% and 6.2% above 20 V bias.