Modeling of a Vortex Water-Wall Argon Arc Lamp for Rapid Thermal Annealing Applications

This paper describes a modeling approach for a vortex water-wall argon arc lamp that is amenable to implementation in real-time controller hardware. The net emission coefficient (NEC) method has been successfully applied for different current levels and can predict the electrical properties of the positive column to sufficient accuracy. The radiation efficiency as a function of the isothermal core temperature has been explained qualitatively, but the correction for radiation efficiency as a function of input power has been implemented as a lookup table using experimental data.